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1、INTERNATIONA1.STANDARDISO4518editionSeCond202104Meta1.1.iccoatingsMeasurementofcoatingthicknessProfi1.ometricmethodRevdtemcntsmta1.1.iqucsMesuragedeITpaisseurderevtementMethodeprofi1.ometriqueOISO2021COPYRIGHTPROTECTEDDOCUMENTISO2021岫rkdea/山thUcdOthcnviscjftc三orrtmcehDVBiwixuioiti08phnn11UatiocBhrho
2、tocp)Mng,ptbcatonpostingontheinternetoranintranet,withoutpriorwrittenpermission.PermissioncanherequestedfromeitherISOattheaddressbe1.oworISsmemberbodyinthecountryoftherequester.%,tft晒Iandonnet8CH-1214*crnicr,GenevaPhone：M1.22749O1.11Pub1.ishedinSwitzerhnd5Instrumentation-Operationa1.parametersandmea
3、surementcharacteristics5.1 Typesofprofi1.erecordinginstrumentsa) contactmeasureinstruments,roughnesssurfaceana1.ysers*purposesofprofi1.erecorders*,genera1.1.yThisdocumentspecifiesamethodforthemeasurementofmeta1.coatingthicknessbyfirstformingastepusingIheprofi1.eofthecoatingandItcoversofsubstrateandt
4、henmeasuringthethePnxredUreappropriatetothisspecificapp1.icationofprofi1.ometricmethods.onf1.atmethodisand,iftheprecautionsaretaken,ofmeta1.coatingsfromItismto1OOOmforthemeasurementofminutethicknessesbut.forthicknessesof1.essthan0,01m,surfacef1.atnessandsurfacesmoothnessareverycritica1.and,according
5、1.y,themethodisnotsuitab1.eforusedowntothe1.owest1.eve1.ofthicknessesforcoatingsty1.usreferenceThemethodThefo1.1.owingdocumentsarereferredtointhetextinsuchawaythatsomeora1.1.oftheircontentundatedreferences,theofthisoftheFordateddocumenton1.yIhcanycditioncitedForISO2177,Meta1.1.iccoatingsMeasuremento
6、fcoatingthicknessCou1.ometricmethodbyanodicNotermsanddefinitionsare1.istedinthisdocument.ISOOn1.inebrowsingp1.atform:avai1.ab1.eathttps:/www.iso.org/obp4IECPrincip1.eoftheofsteptobydisso1.vingpartofthecoating(acceptanceoftheorbyofthestepusingaprofi1.erecordinginstrument.Anyofthefo1.1.owingthreetypes
7、maybeused:usedsty1.ussurfaceknownasbutwhich,fortheand*surfacethisdocument,areusedtorecordtheprofi1.eofastep;b) inductivemeasuringprobeordisp1.acementsensor(incrementa1.orabso1.ute)capab1.eofrecordingtheprofi1.eofstep;c) optica1.profi1.ometers,i.e.white-1.ightinterferencemicroscopesorconfoca1.microsc
8、opes(ordinary,W3ft5HdPWic),butwhiWf1.1.ypuVredUfitaftE8MphdWftaneva1.uatetheprofi1.eofastep.娜I网IfcSP硼斑ave谈1M腿搬PFcansuitab1.es稠雕呼三酬糕Ky1.U如期蝴ISnadesignedon1.yforroughnessgenera1.1.ycoverarangeofcoatingthicknessesfrom0r005mto250m.Othercontactinstrumentscoveruptoapproximate1.y1000m.5.2 Sty1.usinstrument
9、sTheseinstrumentsareusedtorecordtheprofi1.eofasurfaceandhavethefo1.1.owingcomponents.5.2.11,57radApick-upnomina1.conica1.radius,PyramIdaIdirectionOfhavingtraverse,inc1.udedang1.em,1.05rador(60)m.Theforceofcontactonthetestsurfacesha1.1.notexceedtheappropriateva1.uegiveninTab1.e1.Tab1.e1Maximumforceon
10、sty1.usNomina1.va1.ueofsty1.ustipradiusfmMaximumstaticforceatthemean1.eve1.2075410SI)6bVa1.uesusefu1.for1.ow-hardnessmeta1.ssuchastin.5.2.2Atraverseunit,thatmovesthepick-upre1.ativetoadatumskidorrinthosecaseswheretheskidcanresu1.tindamagetothesurfaceOrintroducedistortionofthesteptobemeasured,adatums
11、urfacehavingnomina1.formoftheprofi1.e.5.2.3contro1.1.ercomponentthatsoftware,Whichamp1.ifierdisp1.ayandrecordinginstrumentinanye1.ectronicvertica1.andhorizonta1.magnification(zoom).O1.d由八WUFfiM油哪11dana1.og旭Ordi1.iR耻豌树睢Vv)overtheamp1.ifiedva1.uesofthehorizonta1.movementofthetraverseunit(1.zh).5.2.4 P
12、rofi1.erecordinginstrumentswiththefo1.1.owingproperties: traverse1.ength：1mmto100mm; rangeOfthicknessmeasurement:0,005mto250m; heightreso1.ution(dependentontherangeofmeasurement):0r0005mto1m.5.3Inductivemeasuringprobesordisp1.acementsensors5.3.1Thedesignofinductivemeasuringprobesordisp1.acementsenso
13、rsisverysimi1.artothatofthee1.ectronicsty1.usinstruments(see5.2),theprincipa1.differencebeingthatthe1.arge-radiussty1.usdoesnotp1.otthemicroprofi1.eofthesurface.5.3.2Typica1.examp1.esoperationa1.parametersandthemeasuringcharacteristicsofaninductivemeasuringOperationa1.parameters：- a1.inearityofnot1.
14、essthan0,5%;- atab1.eprovidingarecti1.inearmotiontothesurfacetobetraversed;- suitab1.eamp1.i11ers;- usingthefo1.1.owingoperationa1.parameters： radiusofsty1.us:250m; maximummagnification:50000; staticsty1.usforce:0r12N.Measurementcharacteristics: traverse1.ength:100mm; rangeofthicknessmeasurement:1mt
15、o1000m; heightreso1.ution(dependentontherangeofmeasurement)：0,02mto20m.5.4Optica1.profi1.ometersOptica1.profi1.ometersarebasedonthetechno1.ogyofoptica1.microscopes,usesimi1.arobjectivesandthutoMjbehntcRhrtbohbhttfd1.if1.on.theinterferenceorconfoca1.techniqueanddigita1.dataTypica1.examp1.esofthemeasu
16、ringcharacteristicsofoptica1.profi1.ometersareasfo1.1.ows.ForSVhItc-Hghtinterferencemicroscopes： rangeofthicknessmeasurement:10Rato50%ofthemaximummeasurab1.eheightdifference(dependingontheinstrument); heightreso1.ution:0,5nm.Forconfoca1.microscopy： (rfMfdi(gthi(essnS(ttIW9t:10Rato50%ofthemaximummeas
17、urab1.eheightdifference heightreso1.ution：0.5nm.For1.aser-scanningconfoca1.microscopes: rangeofthicknessmeasurement:10Rato50%ofthemaximummeasurab1.eheightdifference(dependingontheinstrument); heightreso1.ution:0,5nm.Forchromaticconfoca1.microscopes： r0,PWW1.ftrAifiUSs1.iirement:10/?uto50%ofthemaximu
18、mmeasurab1.eheightdifference theheightreso1.utiondependsonthese1.ectedsensorandthemeasurab1.eheightdifference：the1.argertheworkingrange,theworsethereso1.ution.6 Factorsre1.atingtoaccuracy6.1 Profi1.erecordBecausethethicknessmeasurementismadefromtherecordedprofi1.e,errorswi1.1.ariseiftherecordingdjct
19、nottyqua1.ityfajt!ifut1roprorou1.dbekepttoaminimumandgenera1.1.yshou1.dnotexceedthe6.5 Sty1.usdiameterandsurfaceroughnessIfasma1.1.diametersty1.usisusedonaroughsurface,thestepheightcanbedifficu1.ttomeasureIninimtX4yt*susediffiCu1.ty.poordefinitionoftheextremesoftherecordedstep.A1.argediametersty1.us
20、IfthesubstrateandcoatingsurfacesareOfdifterentroughness,therecordedstepprofi1.ecanbeRf曲妫牌押曲骸反巽的鸵H股StwUSSAi翁林蛆也限1.?1.sWuccFfcrror.theotherbecauseAsma1.1.diametersty1.usequippedwithane1.ectronicfi1.tertosmoothouttheprofi1.ecanbeadvantageousbutCroundthecorners6.6 CanSurfacerougnnessofthestepprofi1.e.tt
21、gWrfHeightrecordedsubstrate(peaktova1.1.eyheightofthesurfaceprofi1.e)shou1.dWhenoptica1.profi1.ometersareused,the1.atera1.dimensionsofthesurfaceprofi1.ee1.ements(e.g.themS(R5ft1.fimed.e1.ements,Sm)sha1.1.exceedafewtimesthewave1.engthofthe1.ight,otherwise6.7 Vibrationsdifficu1.1.va1.1.eyheightshou1.d
22、notninmizcdbyinsu1.atingequipmentfromvibrations.Inprincip1.e,the6.8 SurfacecurvaturemeasurementShou1.dtraversecarriedsty1.usshou1.dbesurfacepracticab1.e.Ifcurvature1para1.1.e1.tothe6.9 C1.ean1.inessThesurfacestobemeasuredshou1.dbec1.eaned,andthe1.aboratoryairshou1.dbereasonab1.yfreeofdust6.10 Temper
23、ature6.11 Ireasonab1.yconfigurationObsairingdefined1.eve1.sof(e.g.excessiveroundingportionsofcansteps.Theaccuratemeasurenentreasonab1.ywe1.1.6.12 Datumreference(on1.yforprofi1.ometerswithsty1.us)re1.ativetothedatumspecimen,surfacetherecorded.surfacedatumskidtheequipmentindependentridesoverfaithfu1.n
24、essofarecordingwi1.1.dependonthequa1.ity(SmoOthneSSandstraightness)ofthedatum6.13 Ca1.ibrationfrequencywithheightCa1.ibrationusedca1.ibratethebeinstrunient.experience.ThoughchangeJnstrumenttobcCa1.ibrationISO2021-A1.1.rightsreservedVibrationscancauseirregu1.aritiesornoiseintherecordedprofi1.e,making
25、accuratemeasurementpeaktoThiseffectbeexceed10%ofthestepheight.Surfacecurvaturecaninterferewithaccuratemeasurementoftherecordedstepprofi1.e.Thecurvedsurface,thebeoftheoutonasataintheasdirectionof1.eastitmustbee.g.carriedoutonaaxisofacy1.inder.(Thisimp1.iesthatthestepshou1.dbepara1.1.e1.tothedirection
26、ofmaximumcurvature.)Anyforeignmattersuchasdirt,greaseandcorrosionproductscan1.eadtoerroneousmeasurements,anddirtTemperahirevariationscanaffectthemeasurement.Therefore,thetemperatureshou1.dbeuniformandStepstab1.e.Apoor1.ythesteptheupperand1.owerofedges)themakeanstepsshou1.dbedifficu1.tbydefined.Thest
27、y1.usho1.derridesonadatumskidoronadatumsurface,andthevertica1.motionofthesty1.usthesurfaceofthetestskidorandisdatumTheispartofisaroundedsurfacethatofthetestspecimen.Therefererw.Thethicknessmeasurementwi1.1.benotbetterthantheuncertaintyoftheinstrumentca1.ibrationandthatofthestepwhichstandardistorequi
28、redhasto1.earnedbyTheca1.ibrationcantheandthecanbecarefu1.1.yca1.ibrated,anerrorof2%canexistbecauseofnon1.inearityoftheinstrumentresponse.Tominimizethiserror,theinstrumentcanboca1.ibratedattwopointsc1.ose1.ybracketingthestepheight7 measured.attentionCa1.ibratefactorsinstrumentaccordancewiththemanufa
29、cturersinstructions,Payingappropriate7.2uncertaintystepheightofthestandardsstepstoca1.ibratetheinstrumentuncertaintycanconsiderab1.ygreaterthan5%.7.3suspected.theca1.ibrationatregu1.arinterva1.s(see6.13)randwheneveraca1.ibrationchangeis8 Measuringprocedure8.2 Preparationofstep8.2.1Removeaportionofth
30、ecoatingwithoutanyattackonitssubstrate.Thetopofthestepsha1.1.notbemarredorattackedinanyway,andthebottomofthestepsha1.1.befreeofanytracesofthecoating.Suitab1.emethodsofproducingstepsaregivenin8.1.2,8.1.3and8.1.4.8.2.2exposedCiateria1.maska1.1.wi1.1.notcatingtheSUbStraIc.areathendisso1.ved.Disso1.veth
31、emaskingmateria1.8.2.3Oou1.omecricDisso1.vcnwasuremcntareaIhickncsscoatinganodicane1.ectro1.yticaccordancesameIyP2177.usedforthe|rxifi)fuwersicps.thesty1.usacrossthediameterofthecirc1.eproducedbythesma1.1.ce1.1.canprovideaInordertobeconsistentwiththedefinitioninISO2064ofminimumthicknessasmeasuredove
32、ra在忸品CeSqUare,S蛆邨瞑小胸嗣幡揄榔蚪2加和帆挑襟arestCOa椭帆冲efourcornersofthesquare.Figure1Foursma1.1.circu1.arareasofremovedcoatingwithinasquareof1cmside1.ength8.2.4maskedsomecases.sufficien1.1.ysma1.1.(diametermaskingportionmmtheorsubstratesopriorbui1.d-upwi1.1.notinterferewiththemeasurement.8.3 Recordingofprofi1.e
33、sRecordtheprofi1.eaccordingtotheinstrumentmanufacturersinst11ctions,theoperationa1.parametersiatgCbaenadfartidnbdbMieBtnidbhi1.fcpo(ddQrtbethTti摩POrt0,005m,whicheveristhegreater.Thetestreportsha1.1.inc1.udethefo1.1.owinginformation：a) areferencetothisdocumentinc1.udingtheyearofpub1.ication,i.e,ISO45
34、18:2021；b) theidentityofthetestspecimen;c) theresu1.tsofthetest,indicating:1) thetypeofprofi1.erecordinginst,unent;2) theusedparametersofmeasurement,mannerofeva1.uationandinformationaboutthemeasuringuncertainty;3) themeasuredthickness,inmicrometres;d) anydeviationsfromtheprocedurespecified;e) anyunu
35、sua1.features(anoma1.ies)observedduringthetest;0thedateoftest；g)thenameandsignatureofthepersonsdoingthemeasurementsandre1.easingthereport.Bib1.iography(H删J剂就ent也严/嚼必“w。出erinorganiccoatingsDefinitionsandconventionsconcerningthe2巾f%除破幽朝&蝴钾!微蝴梏(GPS)-Surfacetexture：Profi1.emethod-Nomina1.3 檄P943JK站的W细佛出
36、做?俄J5卿优娱达醉即峭Surfacetexture:Profi1.emethod：4 期次娴呵酰fi丽?网就碎砌饰褥陶切-Surfacetexture:Area1.-Part601：5 槐见阴岫WM；晚痴/GW)P用腕除侵棚倒力成呼叫M唯亚姓”的e-Part602:6 限您他磔如双依站痴t混梯p瞰映出他丹尚福四阳口灯哂细f函由nif密删期UWM初里7 Mcm幽同砌*福M面航郴IB幽戚软珈锹够禅光。附谣阚”2胸W版即卬序rt604:网视贬啊岫&fi碗W网/施胭似胸U啊血必照的豳海:Area1.-Part605：假曜曲蜘魁岷痴蜘B掰I/幽像就闹f例由信的那MieXtUre;Area1.-Part606：10 凝双吸蛔阴MA脑神照阳映总他州瓯砒他f11P叩N珀怫迪联的re:Area1.-Part607:(111领i晒If她Imi国即幌曲IA忸i跖例蹴箧他蝴:切僦M)侬兜啊三三5f)一Part700：(12W9时,雕肉描MfItf版破i%物&出“回则郴照映IUre:Area1.-Part701:1) Underpreparation.Stageatthetimeofpub1.ication：ISO/DIS25178-700:2021.8ICS25.220.40PriCebasedon8pages
